introduction to gaas process products
ppa25: 0.25 µm power phemt process
process features:
- 0.25μm optical t-gate
- planarization process (ion implantation and isolation)
- double recess
- high-q passivation layer
- mim capacitor
- tan resistor(50ω/sq)
- gaas resistor
- air bridge
- backside via hole
- protection overcoat(pbo)
- operation up to vd=8v
classical technical parameters:
idss=360ma/mm,gm=450ms/mm,bvgd=18v,vth=-1.1v
- applicable to medium and small broadband and narrowband power amplifiers, able to realize multiple mmic